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NTEGRA PRIMA
The only atomic force microscope with infinite scalability
NTEGRA Prima is a high-end research atomic force microscope with atomic level resolution. NTEGRA stands for N integrations, which means that as an open atomic force microscope platform, NTEGRA not only possesses SPM technologies such as morphology, electricity, magnetism, mechanics, etching, and manipulation, but also can equip corresponding components or provide the best free construction space according to users' potential needs. For example, near-field optics, Raman/fluorescence spectroscopy, external magnetic field, acoustic atomic force, and other functions. Thanks to the design of the open platform, these functions only require upgrading the corresponding components, without the need to replace the base, control box, software, etc. Greatly enhancing the potential of the instrument and enriching users' research methods!
Basic information
NTEGRA PRIMA is the most representative multifunctional instrument in the field of scanning probe microscopy. This instrument is capable of performing over 40 measurement methods, allowing for high-precision and high-resolution analysis of the physical and chemical properties of surfaces in air, liquid, and controlled environments. The new generation of electronic products offers high-frequency (up to 5 MHz) mode operation This feature enables the instrument to achieve high-frequency AFM mode and use high-frequency cantilevers* NTEGRA Prima can achieve multiple scanning modes: sample scanning, probe scanning, and dual scanning modes. Therefore, this system can not only achieve ultra-high resolution (atomic and molecular level) research on small samples, but also research on large samples, with a scanning range of up to 100 × 100x10m. The unique DualScan TM mode allows for analysis of samples over a larger area (X, Y, and Z are 200 × 200 m and 22 m, respectively), particularly useful for live cells and MEMS components with a large scanning range. Built in three-axis closed-loop control sensor tracks the true displacement of the scanner, compensating for the inevitable nonlinearity, creep, and hysteresis defects of piezoelectric ceramics. The sensor of NT-MDT has the lowest noise level and can also achieve closed-loop control in a very small scanning area (10 × 10 nm). This is particularly valuable for achieving nanomanipulation and nanoetching. NTEGRA Prima has a built-in optical system with a resolution of 1um, allowing for real-time imaging of the scanning process. Due to its open structure, the functionality of NTEGRA Prima can be fundamentally expanded, including specialized magnetic measurements with external magnetic fields, high-temperature experiments, near-field optical microscopy, Raman spectroscopy, and more* For example, the unique method of Atomic Force Acoustic Microscopy (AFAM) allows for the analysis of the softness and hardness of samples by quantitatively measuring the Young's modulus at each scanning point. Compared with phase imaging mode, AFAM can achieve better contrast for soft targets, making it possible to obtain contrast on hard samples, which is a very difficult task when using other methods.
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Biology and Biotechnology
protein, DNA， Viruses, bacteria, tissues -
material science
Surface morphology, local piezoelectric properties, local adhesion properties, local frictional properties -
magnetic material
Visualization of magnetic domain structure, observation of magnetization reversal process under external magnetic field, observation of magnetization reversal process at different temperatures -
Semiconductor, electrical measurement
Measurement of chip and other structural forms, local surface potential and capacitance, imaging of electric domain structures, determination of heterojunction boundaries and semiconductor regions with different doping levels, failure analysis (localization of conductor line failure and dielectric layer leakage) -
Polymers and organic films
Spherical crystals and dendritic crystals, polymer single crystals, polymer nanoparticles, LB films, organic thin films
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Data storage devices and media
CD, DVD discs, terabit storage with thermal mechanical, electronic, and other types of records -
nanomaterials
Nanomaterials, nanocomposite materials, nanoporous materials -
nanostructure
Fullerenes, nanotubes, nanowires, nanocapsules -
Nanoelectronics
Quantum dots, nanowires, quantum structures -
nanosizing
AFM lithography: force (AC and DC), current (local anodizing), STM lithography -
nanoparticles
Contact force
index
Measurement mode
In air and liquid:
AFM (Contact+Half Contact+Non Contact)/Lateral Force Microscopy/Phase Imaging/Force Modulation/Adhesion Imaging/Nanoetching: AFM (Force)
In the air:
STM/Magnetic force microscope/Electrostatic force microscope/Scanning capacitance microscope/Kelvin probe microscope/Extended resistance imaging/Photolithography: AFM (current), STM/AFAM (optional)
| scan type | Sample scanning | Probe scanning* | |
|---|---|---|---|
| sample size | With a diameter of up to 40 millimeters, Up to 15 millimeters in height |
With a diameter of up to 100 millimeters, Height can reach up to 15 millimeters |
|
| Sample weight | Up to 100 grams | Up to 300 grams | |
| XY Sample Orthodontics | 5 x 5 millimeters | ||
| Positioning Resolution | Resolution -5 μ m Sensitivity -2 microns |
||
| Scan range | 100x100x10μm 3x3x2，6 um Less than 1x1x1 μ m |
100x100x10μm 50x50x5 um |
|
| Up to 200x200x20 microns**(DualScan)TMMode) | |||
|
Nonlinear, XY
(with closed-loop sensor) |
≤0.1% | ≤0.15% | |
|
Noise level, Z
(Root mean square with a bandwidth of 1000 Hz) |
Equipped with sensors | 0.04nm (usually), ≤0.06nm |
0.06nm (usually), ≤0.07nm |
| Without sensors | 0.03nm | 0.05 nm | |
|
Noise level, XY***
(Root mean square with a bandwidth of 200 Hz) |
Equipped with sensors | 0.2 nm (usually), ≤0.3nm(XY 100 Um) |
0.1nm (usually), ≤0.2nm(XY 50 Um) |
| Without sensors | 0.02nm(XY 100 Um)， 0.001 nm(XY3um) |
0.01nm(XY 50 Um)， | |
|
Linear dimension estimation error
(with sensors) |
± 0.5% | ± 1.2% | |
| optical viewing system | Optical resolution | 1 micron (0.4 μ m optional, NA 0.7)**** |
3 microns |
| field of view | 4.5-0.4 millimeters | 2.0-0.4 millimeters | |
| zooming | support | support | |
| Vibration isolation | active | 0.7-1000Hz | |
| passive | Above 1 kHz | ||
*The scanning head can be configured as an independent device for unlimited sample sizes.
*It can be extended to 200x200x20 mm at will.
*The built-in capacitive sensor has extremely low noise, and any area smaller than 50 × 50 nm can be scanned using closed-loop control.
*The high-resolution observation system (HRV head) is optional and provides additional functionality, making it possible to generate and detect near-field effects with fewer tip positioning apertures.
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